Pirani pressure sensor with distributed temperature measurement

Author

de Jong, B.R. ; Bula, W.P. ; Zalewski, D. ; van Baar, J.J. ; Wiegerink, R.J.

Author_Institution

MESA/sup +/ Res. Inst., Twente Univ., Enschede, Netherlands

Volume

1

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

718

Abstract

Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 μrn and 1.10 μm, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10⁴ Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.

Keywords

distributed sensors; micromachining; pressure gauges; pressure sensors; temperature measurement; 0.35 micron; 1.10 micron; 10 to 2E4 Pa; Pirani pressure sensor; Pirani sensors; Temperature Coefficient of Resistance; distributed sensing; distributed temperature measurement; pressure gauges; pressure measurement; pressure sensors; surface micromachining; thermal sensors; Biomembranes; Electrical resistance measurement; Heat sinks; Pressure gauges; Pressure measurement; Resistors; Sensor phenomena and characterization; Temperature distribution; Temperature measurement; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279033

Filename

1279033