Direct writing of cylindrical microlenses on polymer substrates

Author

Bormashenko, Ed ; Pogreb, R. ; Socol, Y. ; Itzhaq, M.H. ; Sutovski, S. ; Sheshnev, A. ; Bormashenko, Ye

Author_Institution

Res. Inst., Coll. of Judea & Samaria, Ariel, Israel

Volume

2

fYear

2003

fDate

22-24 Oct. 2003

Firstpage

787

Abstract

The fabrication of cylindrical microlenses and microlens arrays by CO₂ laser irradiation of polyvinylidene fluoride substrates (PVDF) has been demonstrated. Cylindrical microlenses are extensively used for various optical sensing techniques. Microlenses obtained by the proposed process are transparent in the broad middle-IR band, so microlenses could be used for various IR optics applications. PVDF is distinguished by its strong piezoelectric properties. Thus applications of the microlenses in the integrated optic schemes are possible. An experimental technique allowing study of microlens cross-sections was developed. The focusing ability of the microlenses was studied. The optical quality of the microlenses in the visible region was examined by far-field diffraction study.

Keywords

laser materials processing; microlenses; micromachining; optical polymers; piezoelectric materials; CO₂; CO₂ laser irradiation; broad middle-IR band; cylindrical microlenses; direct writing; far-field diffraction study; integrated optic schemes; polymer substrates; polyvinylidene fluoride substrates; strong piezoelectric properties; Glass; Lenses; Mechanical factors; Microoptics; Optical arrays; Optical device fabrication; Optical sensors; Polyethylene; Polymers; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2003. Proceedings of IEEE

Print_ISBN

0-7803-8133-5

Type

conf

DOI

10.1109/ICSENS.2003.1279049

Filename

1279049