Title :
Electronic test solutions for FlowFET fluidic arrays
Author :
Kerkhoff, Hans G. ; Acar, Mustafa
Author_Institution :
Testable Design & Test of Microsyst. Group, MESA Res. Inst., Enschede, Netherlands
Abstract :
The testable design and test of a software-controllable lab-on-a-chip, including a fluidic array of FlowFETs, control and interface electronics is presented. Test hardware is included for detecting faults in the DMOS electro-fluidic interface and the digital parts. Multi-domain fault modelling and simulation shows the effects of faults in the (combined) fluidic and electrical parts. Fault simulations also reveal important parameters of multi-domain test-stimuli for detecting both electrical and fluidic defects.
Keywords :
fault simulation; field effect transistors; finite element analysis; microcontrollers; microfluidics; FlowFET fluidic arrays; electrical defects; electro-fluidic interface; electronic test solutions; fault simulations; fluidic defects; interface electronics; multidomain fault modelling; software-controllable lab; Chemical analysis; Circuit faults; Control system synthesis; Electrical fault detection; Electronic equipment testing; Etching; Fluid flow control; Manufacturing; Silicon; Voltage;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287003
