Title :
Design and characterisation of a low-power micromachined spatial light modulator
Author :
McRobbie, Grueme ; Ling, Zuikung ; Clark, Fruser
Author_Institution :
MicroScale Sensors, Univ. of Paisley, UK
Abstract :
The MEMS spatial modulator proposed in this paper consists of a silicon element coated with a gold reflective layer. The silicon element is supported in the centre of a silicon nitride membrane and a platinum heater is used to control the temperature of the silicon and gold films. Increasing the temperature of the materials encompassed by the heater induces distortions analogous to those produced by heating a bimetallic beam fixed at both ends. To investigate these distortions, a 3-dimensional model of the membrane and the overlay components was constructed with ANSYS finite element software. Analysis of the results generated showed that a half-wavelength phase shift was obtainable with power consumptions less than 10 mW.
Keywords :
finite element analysis; gold; micromachining; micromechanical devices; optical design techniques; silicon; spatial light modulators; thin films; 3-dimensional model; ANSYS finite element software; MEMS spatial modulator; Si-Au; bimetallic beam; gold films; gold reflective layer; heating; low power micromachined spatial light modulator; phase shift; platinum heater; power consumption; silicon element; silicon films; silicon nitride membrane; Biomembranes; Gold; Heating; Micromechanical devices; Optical films; Optical modulation; Platinum; Semiconductor films; Silicon; Temperature control;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Symposium on
Print_ISBN :
0-7803-7066-X
DOI :
10.1109/DTIP.2003.1287033
