Title :
Extended Oxide-Trap extraction method to low frequencies for irradiated MOS transistors
Author :
Djezzar, Boualem ; Smatti, Abderrazak ; Oussalah, Slimane
Author_Institution :
Microelectron. Lab, CDTA, Algiers, Algeria
Abstract :
We present an extraction of the OTCP (Oxide-Trap based on Charge-Pumping method from high frequencies (HF) to low frequencies (LF). Thus using the LF-OTCP method, the interface-trap and border-trap are simultaneously involved in charge pumping (CP) current (Icp) measurements. We have found that radiation-induced oxide-trap (ΔNot) is only dependent on ΔVth (threshold voltage shift). ΔIcpm,h (augmentation of maximum CP current at high frequencies), and ΔIcpm,l (augmentation of maximum CP current at low frequencies). Where δIcpm,l and ΔIcpm,h can be easily obtained from vertical shift of charge pumping curve at low and high frequencies respectively, and ΔVth from lateral one.
Keywords :
MOSFET; electric current measurement; elemental semiconductors; radiation effects; semiconductor device models; silicon; silicon compounds; Si-SiO2; charge-pumping current measurements; interface-trap; irradiated MOS transistors; radiation-induced oxide-trap; Charge measurement; Charge pumps; Current measurement; Frequency measurement; Hafnium; Laboratories; MOSFETs; Microelectronics; Threshold voltage; Tunneling;
Conference_Titel :
Microelectronics, 2003. ICM 2003. Proceedings of the 15th International Conference on
Print_ISBN :
977-05-2010-1
DOI :
10.1109/ICM.2003.1287845