Title :
Large-strain, piezoelectric, in-plane micro-actuator
Author :
Conway, Nicholas J. ; Kim, Sang-Gook
Author_Institution :
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
Abstract :
A new type of high-force, large-displacement, low-voltage piezoelectric actuator has been developed using a compact stroke amplifying mechanism. The device is fabricated using an SU-8 structure as an amplifying mechanism for thin-film PZT. Each actuator "cell" can be arrayed in series and/or in parallel and the design can accommodate different force/displacement requirements. Peak static force of the design tested was 55 μN, and peak static displacement was 1.18 μm at 10 V. Fabricated devices consisting of three actuators in series were tested, which showed a strain amplification ratio in excess of 10:1 per cell.
Keywords :
lead compounds; microactuators; piezoelectric actuators; piezoelectric materials; piezoelectric thin films; 1.18 micron; 10 V; PZT; PbZrO3TiO3; actuator cells; amplifying mechanism; piezoelectric microactuator; piezoelectric thin films; static force; strain amplification ratio; Capacitive sensors; Couplings; Electrostatic actuators; Fabrication; Microactuators; Micromechanical devices; Piezoelectric actuators; Piezoelectric films; Silicon; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290620
