Title :
Robust, large-deflection, in-plane thermal polymer V-shaped actuators
Author :
Haasl, S. ; Griss, Patrick ; Sohlstrom, H. ; Kalvesten, E. ; Stemme, Goran
Author_Institution :
Dept. of Signals Sensors & Syst., R. Inst. of Technol., Stockholm, Sweden
Abstract :
We present the design, fabrication and characteristics of the first in-plane V-shaped polymer actuator. Several different designs are evaluated and compared with each other. The intended application for this actuator is optical component alignment.
Keywords :
microactuators; polymers; inplane thermal polymer V shaped actuator fabrication; optical component alignment; polymer actuator design; Actuators; Lenses; Optical design; Optical device fabrication; Optical devices; Optical materials; Optical polymers; Robustness; Silicon; Thermal expansion;
Conference_Titel :
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Print_ISBN :
0-7803-8265-X
DOI :
10.1109/MEMS.2004.1290634
