Title :
Backside observation technique for SAW distribution under electrodes
Author :
Wakana, Shinichi ; Miyamoto, Akinori ; Ito, Akio
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
A modified SAW distribution observation technique, which employs the polarization detection method, has been developed. A probe light was projected from the backside of the substrate to detect the SAW under the electrodes. The observed results proved that the origin of the leakage SAW is the penetration from the IDT (inter digital transducer) to the electrodes, and busbars transmit the wave as waveguides.
Keywords :
electrodes; interdigital transducers; polarisation; substrates; surface acoustic wave devices; surface acoustic waves; SAW distribution observation; backside observation; busbars; electrodes; interdigital transducer; leakage SAW; polarization detection; probe light; Capacitive sensors; Electrodes; Frequency; Leak detection; Mirrors; Optical losses; Optical polarization; Optical resonators; Probes; Surface acoustic waves;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293241
