DocumentCode :
410236
Title :
Imaging of acoustic fields generated in a longitudinal leaky SAW resonator
Author :
Knuuttila, J.V. ; Holmgren, O. ; Makkonen, T. ; Plessky, V.P. ; Steichen, W. ; Salomaa, Martti M.
Author_Institution :
Mater. Phys. Lab., Helsinki Univ. of Technol., Espoo, Finland
Volume :
1
fYear :
2003
fDate :
5-8 Oct. 2003
Firstpage :
617
Abstract :
We utilize a sensitive scanning laser-interferometric probe to map the spatial distribution of the acoustic field within a one-port synchronous leaky longitudinal SAW (LLSAW) resonator. This marks the first visualization of LLSAWs within such a structure. Interest in these waves exists since LLSAWs feature high velocities (>6100 m/s) on the YZ-LiNbO3 substrate and hence enable the fabrication of bandpass filters operating in the 2.5-5 GHz range with conventional optical lithography. Measurements at frequencies below and above the resonance for a 1.6 GHz LLSAW resonator fabricated on YZ-cut LiNbO3 are performed. We find that below the resonance frequency the longitudinal profile does not feature a beating pattern typically observed for leaky SAW resonators. The transversal profile within the IDT features 2, 3, 4, 5, ... maxima as the drive frequency is increased. Furthermore, oblique Rayleigh-wave beams are observed to radiate from the sides of the resonator.
Keywords :
Rayleigh waves; acoustic imaging; band-pass filters; photolithography; surface acoustic wave resonators; 2.5 to 5 GHz; Rayleigh wave beams; Y2O3ZrO2-LiNbO3; acoustic field imaging; bandpass filters; longitudinal leaky SAW resonator; optical lithography; resonance frequency; scanning laser interferometric probe; transversal profile; Acoustic imaging; Band pass filters; Frequency; Optical device fabrication; Optical imaging; Optical resonators; Probes; Resonance; Surface acoustic waves; Visualization;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
Type :
conf
DOI :
10.1109/ULTSYM.2003.1293479
Filename :
1293479
Link To Document :
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