DocumentCode
411747
Title
100 nm-level air holes machined with laser direct writing method
Author
Li, Ming ; Mori, Kiyotaka ; Greig, Christian ; Liu, Xinbing ; Sugimoto, Yoshimasa ; Ikeda, Naoki ; Asakawa, Kiyoshi
fYear
2003
fDate
6-6 June 2003
Firstpage
324
Lastpage
325
Abstract
The Femtosecond Technology Research Association
Keywords
Frequency; Laser ablation; Laser beams; Optical materials; Optical pumping; Optical refraction; Ultrafast optics; Waveguide lasers; Writing; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1297829
Link To Document