Title :
Large area, high speed InGaAs thin film MSMs for heterogeneously integrated optoelectronies
Author :
Seo, S.W. ; Shen, J.J. ; Jokerst, N.M. ; Brown, A.S.
Author_Institution :
School of Electrical and Computer Engineering, Georgia Institute of Technology
Keywords :
Dark current; Detectors; Etching; Fingers; High speed optical techniques; Indium gallium arsenide; Optical films; Photodetectors; Substrates; Transistors;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
