DocumentCode
411965
Title
A single-crystal silicon-based micromirror with large scanning angle for biomedical applications
Author
Xie, Huikai ; Jain, Ankur ; Xie, Tuqiang ; Pan, Yingtian ; Fedder, Gary K.
Author_Institution
University of Florida
fYear
2003
fDate
6-6 June 2003
Firstpage
858
Lastpage
860
Keywords
Actuators; Application software; Biomedical computing; Biomedical engineering; Biomedical imaging; Etching; Micromirrors; Mirrors; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298114
Link To Document