Title :
Thermo-optically tunable thin film components
Author :
Domash, Lawrence H. ; Nemchuk, Nikolay ; Wu, Ming
Author_Institution :
Aegis Semicond. Inc., Woburn, MA, USA
Abstract :
Thermo-optically tunable thin film components have been developed based on amorphous semiconductors deposited by PECVD. Single cavity and multiple cavity structures are possible, with a wide variety of design possibilities exhibiting tunability not only in wavelength but also in transmission, bandwidth or chromatic dispersion.
Keywords :
amorphous semiconductors; optical films; plasma CVD; thermo-optical devices; PECVD; amorphous semiconductor; bandwidth dispersion; chromatic dispersion; multiple cavity structure; single cavity structure; thermo-optically tunable thin film component; Amorphous semiconductors; Band pass filters; Fabry-Perot; Monitoring; Optical films; Optical filters; Piezoelectric films; Semiconductor films; Semiconductor thin films; Transistors;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
