Title :
Thermo-optic switching devices in thin silicon-on-insulator
Author :
Espinola, R.L. ; Tsai, M. ; Izuhara, T. ; Osgood, R.M., Jr.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
Abstract :
The thin SOI materials system can be used to make compact, high speed, and low power photonic integrated devices. We describe and characterize the Mach-Zehnder thermo-optic switches in thin SOI material.
Keywords :
integrated optics; optical fabrication; optical switches; silicon-on-insulator; thermo-optical devices; Mach-Zehnder thermo-optic switches; power photonic integrated device; thermo-optic switching device; thin SOI materials system; thin silicon-on-insulator; High speed optical techniques; Optical devices; Optical interferometry; Optical materials; Optical polymers; Optical switches; Optical waveguides; Silicon on insulator technology; Switching circuits; Thermooptical devices;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
