DocumentCode :
412178
Title :
Imaging interferometric microscopy of two-dimensional structures
Author :
Schwarz, C.J. ; Kuznetsova, Yuliya ; Brueck, S.R.J.
Author_Institution :
Center for High Technol. Mater., Albuquerque, NM, USA
fYear :
2003
fDate :
6-6 June 2003
Abstract :
We demonstrate the imaging of two-dimensional patterns by IIM and compare the results achieved with a low NA lens having a long working distance, a large-field-of-view and a long depth-of-field with a Fourier optics model and a conventional microscope image of a high NA lens.
Keywords :
Fourier transform optics; lenses; light interferometry; optical images; optical microscopy; Fourier optics model; imaging interferometric microscopy; large-field-of-view; long depth-of-field; low NA lens; two-dimensional structures; Adaptive optics; Frequency; High-resolution imaging; Holographic optical components; Holography; Lenses; Lighting; Optical imaging; Optical interferometry; Optical microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
Type :
conf
Filename :
1298328
Link To Document :
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