Title :
A MEMS tunable asymmetric Fabry-Perot well modulator
Author :
Stievater, T.H. ; Rabinovich, W.S. ; Papanicolaou, N.A. ; Goetz, P.G.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
Asymmetric Fabry-Perot quantum well modulators have proven difficult to optimize due to the sensitive dependence of the cavity mode and exciton wavelength on layer thicknesses, alloy composition, temperature, and angle. We demonstrate that a tunable optical cavity using a MEMS mirror removes this sensitivity.
Keywords :
III-V semiconductors; gallium arsenide; indium compounds; micromechanical devices; micromirrors; optical modulation; optical tuning; semiconductor quantum wells; InGaAs; MEMS mirror; MEMS tuning; asymmetric Fabry-Perot quantum well modulator; exciton wavelength; tunable optical cavity mode; Excitons; Fabry-Perot; Micromechanical devices; Mirrors; Optical devices; Optical losses; Optical modulation; Optical sensors; Reflectivity; Resonance;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
