DocumentCode
412183
Title
A MEMS tunable asymmetric Fabry-Perot well modulator
Author
Stievater, T.H. ; Rabinovich, W.S. ; Papanicolaou, N.A. ; Goetz, P.G.
Author_Institution
Naval Res. Lab., Washington, DC, USA
fYear
2003
fDate
6-6 June 2003
Abstract
Asymmetric Fabry-Perot quantum well modulators have proven difficult to optimize due to the sensitive dependence of the cavity mode and exciton wavelength on layer thicknesses, alloy composition, temperature, and angle. We demonstrate that a tunable optical cavity using a MEMS mirror removes this sensitivity.
Keywords
III-V semiconductors; gallium arsenide; indium compounds; micromechanical devices; micromirrors; optical modulation; optical tuning; semiconductor quantum wells; InGaAs; MEMS mirror; MEMS tuning; asymmetric Fabry-Perot quantum well modulator; exciton wavelength; tunable optical cavity mode; Excitons; Fabry-Perot; Micromechanical devices; Mirrors; Optical devices; Optical losses; Optical modulation; Optical sensors; Reflectivity; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298333
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