Title :
Optical MEMS fabrication, scaling and design of microoptical devices and systems
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
MEMS technology offer substantial advantages for optical systems: Tight dimensional tolerances allow accurate control of optical fields, MEMS actuators provide tunability, parallel processing leads to low cost, and miniaturization simplifies packaging and installation. Cost-effective use of microfabrication technology requires miniaturization, however, so optical MEMS presents unique challenges in design and scaling.
Keywords :
micro-optics; microactuators; optical control; optical design techniques; optical fabrication; optical tuning; MEMS actuators; MEMS technology; installation; microoptical devices design; optical MEMS fabrication; optical MEMS scaling; optical fields control; packaging; parallel processing; tunability; Actuators; Control systems; Costs; Micromechanical devices; Optical control; Optical design; Optical device fabrication; Optical devices; Packaging; Parallel processing;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
