Q-switched CO/sub 2/ laser induced plasma/plume during laser ablation

Author

Jingjiao Lin ; Sun, Yunlong ; Swenson, Edward J. ; Sun, Lei ; Li, Zhongli

Author_Institution

Oregon State University

fYear

2003

fDate

6-6 June 2003

Firstpage

1605

Lastpage

1606

Keywords

Cameras; Copper; Etching; Laser ablation; Optical pulses; Plasma applications; Plasma materials processing; Plasma temperature; Polyimides; Resins;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2003. CLEO '03. Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-748-2

Type

Filename

1298434

Link To Document