DocumentCode :
412283
Title :
Q-switched CO/sub 2/ laser induced plasma/plume during laser ablation
Author :
Jingjiao Lin ; Sun, Yunlong ; Swenson, Edward J. ; Sun, Lei ; Li, Zhongli
Author_Institution :
Oregon State University
fYear :
2003
fDate :
6-6 June 2003
Firstpage :
1605
Lastpage :
1606
Keywords :
Cameras; Copper; Etching; Laser ablation; Optical pulses; Plasma applications; Plasma materials processing; Plasma temperature; Polyimides; Resins;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
Type :
conf
Filename :
1298434
Link To Document :
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