DocumentCode
412287
Title
New low temperature fetuto-second laser annealing method for TFT fabrication technology
Author
Zaitsev, Alexei K. ; Wang, Yi-Chao ; Pan, Ci-Ling ; Shieh, Jia-Min
Author_Institution
National Chiao Tung University
fYear
2003
fDate
6-6 June 2003
Firstpage
1611
Lastpage
1613
Keywords
Annealing; Crystallization; Gas lasers; Optical device fabrication; Optical films; Silicon; Substrates; Temperature; Thin film transistors; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298438
Link To Document