Title :
Laser heating of noble gas droplet sprays: EUV source efficiency considerations
Author :
Parra, E. ; Fan, J. ; McNaught, S.J. ; Milchberg, H.M.
Author_Institution :
Inst. for Phys. Sci. & Technol., Maryland Univ., College Park, MD, USA
Abstract :
We show that optimizing EUV yield from laser-heated droplet targets requires matching the pulsewidth to the droplet size if the emission feature is from collisional excitation; it can be longer if the feature is from recombination.
Keywords :
drops; inert gases; plasma production by laser; spraying; ultraviolet lithography; EUV source efficiency; collisional excitation; emission feature; laser heating; noble gas droplet sprays; pulsewidth matching; Argon; Delay; Gas lasers; Heating; Optical pulses; Probes; Pump lasers; Spraying; Ultraviolet sources; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
