DocumentCode
412441
Title
Laser heating of noble gas droplet sprays: EUV source efficiency considerations
Author
Parra, E. ; Fan, J. ; McNaught, S.J. ; Milchberg, H.M.
Author_Institution
Inst. for Phys. Sci. & Technol., Maryland Univ., College Park, MD, USA
fYear
2003
fDate
6-6 June 2003
Abstract
We show that optimizing EUV yield from laser-heated droplet targets requires matching the pulsewidth to the droplet size if the emission feature is from collisional excitation; it can be longer if the feature is from recombination.
Keywords
drops; inert gases; plasma production by laser; spraying; ultraviolet lithography; EUV source efficiency; collisional excitation; emission feature; laser heating; noble gas droplet sprays; pulsewidth matching; Argon; Delay; Gas lasers; Heating; Optical pulses; Probes; Pump lasers; Spraying; Ultraviolet sources; X-ray lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-748-2
Type
conf
Filename
1298592
Link To Document