Title :
Nanolithography by enhanced laser irradiation
Author_Institution :
Dept. of Electr. Eng., Nebraska Univ., Lincoln, NE, USA
Abstract :
A general model for the near-field optical intensity induced by a conductive tip under polarized laser irradiation is developed for the laser-assisted SPM. The calculations show that a 3:1 silver SPM tip can induce an optical field enhancement of 525 times on a gold substrate surface. Field enhancement and intensity profiles strongly depend on the tip-sample geometry, laser parameters and the dielectric properties of the tip and sample. The temperature rise was analyzed for the cases with and without tip-surface contact. Thermal expansion of the tip is calculated and compared with the tip-sample distance of an SPM junction to determine whether contact between the tip and sample surface occurred.
Keywords :
conducting materials; dielectric properties; gold; laser beam effects; light polarisation; nanolithography; optical fabrication; scanning probe microscopy; silver; thermal expansion; Ag; Au; dielectric property; enhanced laser irradiation; gold substrate surface; intensity profile; laser parameters; laser-assisted SPM; nanolithography; nanoscale conductive tip; near-field optical intensity; optical field enhancement; polarized laser irradiation; thermal expansion calculation; tip-sample geometry; Dielectric substrates; Geometrical optics; Gold; Laser modes; Nanolithography; Optical polarization; Scanning probe microscopy; Silver; Temperature; Thermal expansion;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
