Title :
F/sub 2/-laser micromachining of microfluidic channels and vias for biophotonic chip applications
Author :
Herman, Peter R. ; Yick, Andrew ; Li, Jianzhao ; Munce, Nigel ; Lilge, Lothar ; Jervis, Eric ; Krylov, Sergey
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Abstract :
Deep-ultraviolet F/sub 2/-laser radiation drives strong interactions in optically transparent glasses for smooth and crack-free shaping of microfluidic channels, microvias, and arrays for cell-on-a-chip applications. We describe cell manipulation and imaging applications in custom fabricated biophotonic chips.
Keywords :
biomedical optical imaging; cellular biophysics; fluorine; gas lasers; laser beam effects; laser beam machining; micro-optics; microfluidics; optical fabrication; optical glass; transparency; F/sub 2/; F/sub 2/-laser micromachining; arrays; biophotonic chip applications; cell imaging applications; cell manipulation; cell-on-a-chip applications; crack-free shaping; deep-ultraviolet F/sub 2/-laser radiation; microfluidic channels; microvias; optically transparent glass; smooth shaping; Biological materials; Biomedical optical imaging; Biophotonics; Glass; Laser modes; Microfluidics; Micromachining; Optical materials; Optical mixing; Optical surface waves;
Conference_Titel :
Lasers and Electro-Optics, 2003. CLEO '03. Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-748-2
