The parameters of the plasma generated due to the interaction of an accelerated electron flow on the surface of a dielectric were investigated. The electron flow was produced in an explosive-emission diode on application of a voltage pulse of duration 3 ns and amplitude 150 kV. As a result of the experiment, flows of carbon ions with up to
charges, as well as hydrogen and deuterium ions were detected. The hydrogen ions were accelerated to energies of up to 400 keV. The energies of carbon and deuterium ions reached 5 keV. It was found that the ion energies vary indirectly with charge. As the cathode–dielectric separation was increased, only hydrogen ions were detected in the ion flow, and their energies increased over a distance of up to 7 mm from the dielectric. It was shown that hydrogen ions can be accelerated in several individual bunches, each with a narrow energy distribution.