DocumentCode
413647
Title
Environmental health and safety (EHS) issues in III-V solar cell manufacturing
Author
Fthenakis, Vasilis M. ; Bowerman, Biays
Author_Institution
Nat. PV EHS Assistance Center, Brookhaven Nat. Lab., Upton, NY, USA
Volume
1
fYear
2003
fDate
18-18 May 2003
Firstpage
681
Abstract
Large-scale manufacturing of III-V high-performance photovoltaics will require close attention to environmental, health and safety (EHS) issues. This paper reviews such issues and highlights challenges resulting from using large quantities of arsine, phosphine, and hydrogen in current MOCVD. These gases can be used safely when multi-layers of protection are implemented; these are discussed herein. The cost related to risk management must be considered in deciding upon new and larger manufacturing facilities. The best way to minimize both the risks associated with hazardous chemicals and the costs of managing risk is to consider safer delivery and/or alternative sources. Alternatives are outlined for scaling up production in the short-term and in the future.
Keywords
III-V semiconductors; MOCVD; health and safety; semiconductor device manufacture; solar cells; III-V solar cell manufacturing; MOCVD; alternative source; environmental issues; hazardous chemical; health issues; high-performance photovoltaics; large-scale manufacturing; safety issues;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on
Conference_Location
Osaka, Japan
Print_ISBN
4-9901816-0-3
Type
conf
Filename
1305373
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