Large-area deposition for crystalline silicon on glass modules

This paper presents the current status of the Crystalline Silicon on Glass (CSG) technology for low-cost photovoltaic modules that is being developed at Pacific Solar. This technology combines the low manufacturing cost of large-area monolithic construction with the established durability of crystalline silicon. The heart of the manufacturing sequence for this technology is the PECVD silicon deposition process. Equipment developed for the flat-panel display industry appears to meet the requirements for this process. A single-chamber KAI-800 system from Unaxis has been installed at Pacific Solar that deposits silicon layers onto 0.7-m/sup 2/ sheets of textured glass. Initial results using this equipment are reported, including data for deposition rate, uniformity, manufacturing cost, and the performance of small modules made using material deposited in this system.