Title : 
Implementation of selective diffusion in large-scale production of mc-Si solar cells
         
        
            Author : 
Li, Hua ; Wang, Yichuan ; Ji, Jinglia ; Chen, Rulong ; Xu, Yanqi ; Shao, Aijun ; Tong, Caixia ; Shi, Zhengrong
         
        
            Author_Institution : 
Suntech Power Co. Ltd., Wuxi New District, China
         
        
        
        
        
        
            Abstract : 
This paper describes the implementation of high efficiency features in large-scale production of multi-crystalline silicon (mc-Si) solar cells. We developed novel techniques to form selective diffusion and surface texture in mc-Si solar cell fabrication. These techniques are successfully implemented in production line without incurring much disproportionate increase in process complexity and thus production cost, we performed a series of statistically designed experiments to optimize the co-firing process to improve the efficiency of the cells. The IQE data indicates an improvement of blue response at 400 nm about 23% higher than conventional 40-45 ohm/sq emitter cells and the FF is increased to 78%. The reflectance measurement confirms that the texturing process works quite effectively on mc-Si surface. An average lot efficiency of 15.84% was produced from our production line.
         
        
            Keywords : 
elemental semiconductors; reflectivity; semiconductor device manufacture; silicon; solar cells; surface diffusion; surface texture; 15.84 percent; Si; blue response; cell efficiency; co-firing process; emitter cells; fill factor; large-scale production; mc-Si solar cells; reflectance; selective diffusion; statistically designed experiment; surface texture; texturing process;
         
        
        
        
            Conference_Titel : 
Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on
         
        
            Conference_Location : 
Osaka, Japan
         
        
            Print_ISBN : 
4-9901816-0-3