Thermal annealing characteristics of amorphous silicon-based solar cells incorporating stable protocrystalline silicon and unstable microcrystalline silicon at the onset of a microcrystalline regime

We investigated the light-soaking behaviors and the thermal annealing kinetics of amorphous silicon-based solar cells incorporating hydrogen-diluted films as i-layers deposited at several hydrogen dilution ratios. From the investigation, we confirmed that the protocrystalline silicon was most stable against light soaking, and also that the film deposited at the onset of the microcrystalline regime, which were known to have the most competent device quality and stability, was less stable. Charged dangling bonds defects caused by inhomogeneous microstructure of the onset of the microcrystalline regime, was suggested as one of reasons for the instability at the onset regime.