Title :
Fabrication technologies for large-area plastic-film-substrate solar cells
Author :
Fujikake, Shinji ; Uno, Masayoshi ; Iwasaki, Shinji ; Takeda, Yukio ; Wada, Takehito ; Tanda, Masayuki ; Takano, Akihiro ; Yoshida, Takashi
Author_Institution :
Fuji Electr. Corp. R&D Ltd., Yokosuka, Japan
Abstract :
We have been developing large-area a-Si-based solar cells on plastic-film substrates. For further improvement in throughput, we tried to increase the deposition rates of the top a-Si cell and the bottom a-SiGe cell. Based on our previous work, we investigated the relation among the deposition conditions, peak-to-peak voltage of applied power and the stabilized efficiencies of small-area single-junction cells fabricated on the film. As a result, we obtained a-Si and a-SiGe single-junction cells with deposition rates of over 20 nm/min. They were applied to large-area a-Si/a-SiGe double-junction cells to achieve a stabilized efficiency of 8.0%.
Keywords :
Ge-Si alloys; amorphous semiconductors; elemental semiconductors; plasma CVD; semiconductor growth; semiconductor thin films; silicon; solar cells; Si; SiGe; amorphous Si based solar cells; amorphous Si double junction cells; amorphous Si single junction cells; amorphous SiGe double junction cells; amorphous SiGe single junction cells; fabrication technology; plastic film substrate;
Conference_Titel :
Photovoltaic Energy Conversion, 2003. Proceedings of 3rd World Conference on
Conference_Location :
Osaka, Japan
Print_ISBN :
4-9901816-0-3
