Title :
A new analytical inductance extraction technique of on-wafer spiral inductors
Author :
Shima, Hideki ; Matsuoka, Toshimasa ; Taniguchi, Kenji
Author_Institution :
Dept. of Electron. & Inf. Syst., Osaka Univ., Japan
Abstract :
We derive a novel scalable self-inductance expression of interconnects connected to spiral inductors. With the use of the expression, the intrinsic inductance of spiral inductors can be extracted from measured results without any special fixtures. The accuracy of the proposed expression is proved by an electromagnetic simulator. In a comparison with the field solver, our calculated inductances match simulated results within 1.4%.
Keywords :
computational electromagnetics; inductance measurement; inductors; integrated circuit interconnections; integrated circuit measurement; integrated circuit modelling; analytical inductance extraction technique; electromagnetic simulator; interconnects; intrinsic inductance; on-wafer spiral inductors; scalable self-inductance expression; Data mining; Fixtures; Inductance measurement; Inductors; Integrated circuit interconnections; Integrated circuit measurements; Magnetic analysis; Magnetic separation; Radiofrequency integrated circuits; Spirals;
Conference_Titel :
Microelectronic Test Structures, 2004. Proceedings. ICMTS '04. The International Conference on
Print_ISBN :
0-7803-8262-5
DOI :
10.1109/ICMTS.2004.1309495
