Micro-electro-mechanically tunable two-chip VCSELS for long wavelengths

In this paper, we present an micro-electro-mechanically tunable VCSEL based on a two-chip concept. It composed of two independent chips, one membrane chip which supports a movable mirror membrane and a half-VCSEL chip that consists of a fixed bottom mirror and an optically or electrically pumped amplifying active region. When the active region is pumped by injecting 980 nm laser light through a lensed fiber that produces a mode field diameter of 25μm. We obtained a CW output power of 0.5 mW over a tuning range of 24 nm at room temperature.