DocumentCode
41522
Title
Large-Area Cold Atmospheric Pressure Discharges Realized by Mesh Covered Tube-Plate Electrodes in Open Air
Author
Qiang Chen ; Shirai, Hiroshi
Author_Institution
Grad. Sch. of Sci. & Eng., Saitama Univ., Saitama, Japan
Volume
41
Issue
3
fYear
2013
fDate
Mar-13
Firstpage
421
Lastpage
424
Abstract
A large-area atmospheric pressure plasma with low temperature and high electron density was realized using mesh covered tube-plate electrodes at an RF power as low as 4 W. The gas temperature is less than 351 K, while the electron temperature is about 5000 K. The estimated electron density is on the order of 1012 cm-3. Electrical measurements indicate that the discharges are capacitive and operated in an abnormal glow discharge mode. In addition, a self-bias observed at the powered tube electrode increases with increasing power and is positive at high powers.
Keywords
air; electrodes; gas-discharge tubes; glow discharges; plasma density; plasma diagnostics; plasma temperature; plasma transport processes; RF power; electrical measurements; electron density; electron temperature; gas temperature; glow discharge mode; large-area cold atmospheric pressure discharges; pressure 1 atm; self-biasing; tube-plate electrodes; Argon; Discharges (electric); Electrodes; Electron tubes; Plasma temperature; Radio frequency; Atmospheric pressure discharge plasma (APDP); cold plasma; optical emission spectrum; positive self-bias;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2013.2241081
Filename
6428717
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