Title :
1m2 order single-layer slotted waveguide arrays for plasma excitation
Author :
Hirano, Takuichi ; Nakano, Yusuke ; Ando, Makoto ; Goto, Masashi ; Sasaki, Atsushi ; Okamoto, Tetsuya ; Azuma, Kazufumi ; Nakata, Yukihiko
Author_Institution :
Dept. of Int. Dev. Eng, Tokyo Inst. of Technol., Japan
Abstract :
A single-layer slotted waveguide array is proposed for 1m2 plasma excitation at a microwave frequency (2.45 GHz). The electromagnetic field distribution over the aperture is measured with and without the quartz window attached. More accurate slot design will be conducted with the vacuum window, plasma chamber as well as the plasma taken into account.
Keywords :
UHF antennas; antennas in plasma; aperture antennas; electromagnetic fields; slot antenna arrays; 2.45 GHz; aperture; electromagnetic field distribution; plasma excitation; quartz window; single-layer slotted waveguide arrays; Antenna measurements; Electromagnetic measurements; Electromagnetic waveguides; Electrons; Plasma density; Plasma displays; Plasma measurements; Plasma properties; Plasma temperature; Plasma waves;
Conference_Titel :
Wireless Communication Technology, 2003. IEEE Topical Conference on
Print_ISBN :
0-7803-8196-3
DOI :
10.1109/WCT.2003.1321559
