DocumentCode
416745
Title
Designing compensator of dual servo system for high precision position control
Author
Choi, Hyeun-Seok ; Song, Chi-woo ; Han, Chang-Soo ; Choi, Tae-hoon ; Lee, Nak-Kyu ; Lee, Hyoung-wook ; Na, Kyung-hwan
Author_Institution
Hanyang Univ., Ansan, South Korea
Volume
3
fYear
2003
fDate
4-6 Aug. 2003
Firstpage
2732
Abstract
This paper presents a micro positioning mechanism with dual servo system. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.
Keywords
compensation; control system synthesis; micropositioning; servomechanisms; dual servo system; high precision position control; lead compensator; micro test instrument; micromanipulation; micropositioning mechanism;
fLanguage
English
Publisher
ieee
Conference_Titel
SICE 2003 Annual Conference
Conference_Location
Fukui, Japan
Print_ISBN
0-7803-8352-4
Type
conf
Filename
1323683
Link To Document