Title :
Designing compensator of dual servo system for high precision position control
Author :
Choi, Hyeun-Seok ; Song, Chi-woo ; Han, Chang-Soo ; Choi, Tae-hoon ; Lee, Nak-Kyu ; Lee, Hyoung-wook ; Na, Kyung-hwan
Author_Institution :
Hanyang Univ., Ansan, South Korea
Abstract :
This paper presents a micro positioning mechanism with dual servo system. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.
Keywords :
compensation; control system synthesis; micropositioning; servomechanisms; dual servo system; high precision position control; lead compensator; micro test instrument; micromanipulation; micropositioning mechanism;
Conference_Titel :
SICE 2003 Annual Conference
Conference_Location :
Fukui, Japan
Print_ISBN :
0-7803-8352-4
