An integrated micromachined waveguide frequency tripler for nonlinear wave propagation

An integrated hybrid package for broadband harmonic generation which consists of a frequency tripler and a micro-machined waveguide has been designed and fabricated and has initially demonstrated a broad range of output frequencies up to 600 GHz. The essence of the approach is that the entire frequency tripler is produced monolithically and incorporates novel HBV devices electrically and mechanically interconnected by a low loss SU-8 membrane. The entire concept of this work is to design a cost effective and compact frequency tripler package exhibiting high nonlinearity whilst minimizing the device series resistance and section parasitics for achieving higher conversion efficiency, and with a high commercial potential for applications at submillimeter wave and Terahertz frequencies.