Title :
Fabrication of Humidity Sensor Based on Bilayer Graphene
Author :
Meng-Chu Chen ; Cheng-Liang Hsu ; Ting-Jen Hsueh
Author_Institution :
Dept. of Appl. Sci., Nat. Taitung Univ., Taitung, Taiwan
Abstract :
Bilayer graphene was synthesized by chemical vapor deposition, for which the optical transmission is ~95%-96%. XPS detected that a few oxygen molecules were absorbed on the surface of graphene. The Raman and optical transmission spectra verified that the graphene sample is bilayer. The responses of the bilayer graphene sample increased with increased relative humidity.
Keywords :
Raman spectra; X-ray photoelectron spectra; chemical vapour deposition; graphene; humidity sensors; visible spectra; C; Raman spectra; XPS; bilayer graphene; chemical vapor deposition; humidity sensor; optical transmission spectra; oxygen molecules; Carbon; Copper; Graphene; Humidity; Optical sensors; Substrates; Temperature measurement; Graphene; bilayer; humidity; sensor; sensor.;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2014.2310741
