• DocumentCode
    420425
  • Title

    A reconfigurable 6-20 GHz RF MEMS impedance tuner

  • Author

    Vähä-Heikkilä, T. ; Varis, J. ; Tuovinen, J. ; Rebeiz, G.M.

  • Author_Institution
    Michigan Univ., USA
  • Volume
    2
  • fYear
    2004
  • fDate
    6-11 June 2004
  • Firstpage
    729
  • Abstract
    A 6-20 GHz reconfigurable triple-stub impedance tuner has been developed. It is based on a 11-switched MEMS capacitor network producing 211 different impedances. The measured and simulated impedance coverage is the widest ever measured to-date from any RF MEMS tuner. This network is most suitable for noise parameters and load-pull measurements of transistors at 6-20 GHz.
  • Keywords
    impedance matching; microswitches; switched capacitor networks; transistors; 6 to 20 GHz; MEMS; RF; SiO2; capacitor network; glass substrate; impedance matching; load-pull measurements; microelectromechanical system; noise parameters; radiofrequency; transistors; triple-stub impedance tuner; Capacitance; Capacitors; Impedance measurement; Micromechanical devices; Microwave transistors; Network topology; Noise measurement; Radiofrequency microelectromechanical systems; Switches; Tuners;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 2004 IEEE MTT-S International
  • ISSN
    0149-645X
  • Print_ISBN
    0-7803-8331-1
  • Type

    conf

  • DOI
    10.1109/MWSYM.2004.1339062
  • Filename
    1339062
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=420425