Micromachined on-chip high-aspect ratio air core solenoid inductor for multi-GHz applications

Author

Lu, Hong ; Pillans, Brandon ; Lee, Jeong-Bong

Author_Institution

Erik Jonsson Sch. of Eng. & Comput. Sci., Texas Univ. at Dallas, Richardson, TX, USA

Volume

2

fYear

2004

fDate

6-11 June 2004

Firstpage

881

Abstract

We present high aspect air-core solenoid inductors with 100 μm and 200 μm tall via structures on Pyrex wafer. The effect of various parameters such as different number of turns, via heights, pitch distance between turns on inductor´s radio frequency (RF) characteristics have been studied. The highest Q factor we obtained from various solenoid inductors is 72.8 at 9.7 GHz, which was produced by a 3-turn inductor. The highest inductance we obtained was from a 20-turn inductor and it was from ∼28 nH at peak Q frequency of 2 GHz 200 μm tall via structures. This inductor occupies 0.75 mm² in area and hold a Q factor of 43 and a self-resonant frequency (SRF) of 5.1 GHz.

Keywords

Q-factor; high-frequency effects; inductors; micromachining; solenoids; 100 micron; 2 GHz; 200 micron; 5.1 GHz; 9.7 GHz; Q factor; air core solenoid inductor; high frequency effect; inductance; inductors radio frequency properties; micromachining; multiGHz applications; pitch distance; pyrex wafer; self-resonant frequency; Application software; Fabrication; Inductance; Inductors; Magnetic cores; Magnetic flux; Parasitic capacitance; Q factor; Radio frequency; Solenoids;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2004 IEEE MTT-S International

ISSN

0149-645X

Print_ISBN

0-7803-8331-1

Type

conf

DOI

10.1109/MWSYM.2004.1339110

Filename

1339110