Title :
A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate
Author :
Kirby, P.L. ; Pukala, D. ; Manohara, H. ; Mehdi, I. ; Papapolymerou, J.
Author_Institution :
Sch. of Electr. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
A micromachined 400 GHz waveguide and waveguide bandpass filter using a split block approach is presented. The waveguide and filter are fabricated using a deep RIE process on high resistivity silicon. Simulation results show an insertion loss for the filter of 0.65 dB with a 20 GHz bandwidth. The assembly of the split block using a fixture block is discussed in detail.
Keywords :
band-pass filters; fixtures; micromachining; micromechanical devices; rectangular waveguides; sputter etching; 0.65 dB; 20 GHz; 3-pole bandpass filter; 400 GHz; Si; bandwidth; deep RIE process; fixture block; high resistivity; insertion loss; micromachined rectangular waveguide; silicon substrate; split block; waveguide bandpass filter; Assembly; Band pass filters; Bandwidth; Conductivity; Frequency; Micromachining; Rectangular waveguides; Silicon; Waveguide components; Wet etching;
Conference_Titel :
Microwave Symposium Digest, 2004 IEEE MTT-S International
Print_ISBN :
0-7803-8331-1
DOI :
10.1109/MWSYM.2004.1339198
