Title :
Small-footprint thermocapillary optical switch with a heater array on a CMOS IC chip
Author :
Sato, Makoto ; Makihara, Mitsubiro ; Shimokawa, Fusao ; Matsui, Shinsuke
Author_Institution :
NTT Microsystem Integration Lab., Kanagawa, Japan
Abstract :
We propose a hybrid structure combining a planar lightwave circuit chip and CMOS IC chip to achieve a compact switch fabric and demonstrate a new 16/spl times/16-size matrix thermocapillary optical switch fabricated based on this concept.
Keywords :
CMOS integrated circuits; arrays; micro-optics; micromechanical devices; optical planar waveguides; optical switches; thermo-optical devices; CMOS IC chip; heater array; planar lightwave circuit chip; small-footprint thermocapillary optical switch;
Conference_Titel :
Optical Fiber Communication Conference, 2004. OFC 2004
Conference_Location :
Los Angeles, CA, USA
Print_ISBN :
1-55752-772-5
