Title :
Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices
Author :
Yamashita, Masatsugu ; Kiwa, Toshihiko ; Tonouchi, Masayoshi ; Kawase, Kodo
Author_Institution :
RIKEN, Wako, Japan
Abstract :
We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.
Keywords :
electrical faults; image resolution; inspection; microprocessor chips; optical microscopy; semiconductor device testing; submillimetre wave imaging; THz emission image; electrical faults inspection; integrated circuits; laser-terahertz emission microscope; microprocessor chip; semiconductor devices; spatial resolution;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
