Title :
Direct synthesis of germanium sulphide glass planar waveguides by chemical vapour deposition (CVD)
Author :
Huang, C.-C. ; Hewak, D.W. ; Badding, J.V.
Author_Institution :
Optoelectron. Res. Centre, Southampton Univ., UK
Abstract :
Germanium sulphide glass has been deposited on CaF/sub 2/ and Schott N-PSK58 glass substrates directly by chemical vapour deposition (CVD). The CVD process has shown the high potential for germanium sulphide glass planar waveguides fabrication.
Keywords :
chalcogenide glasses; chemical vapour deposition; germanium compounds; optical fabrication; optical planar waveguides; semiconductor growth; CaF/sub 2/; GeS; Schott N-PSK58 glass substrates; SiO/sub 2/; chemical vapour deposition; direct synthesis; germanium sulphide glass; planar waveguides; waveguides fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
