Title :
As-grown low-loss germanosilicate layers by PECVD
Author :
Ay, Feridun ; Aydinli, Atilla ; Agan, Sedat
Author_Institution :
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Abstract :
Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.
Keywords :
Fourier transform spectra; germanate glasses; hydrogen bonds; infrared spectra; optical losses; optical planar waveguides; plasma CVD coatings; Fourier transform infrared spectroscopy; GeO/sub 2/SiO/sub 2/; N-H bond concentration; PECVD; as-grown germanosilicate layers; germane; germanosilicate planar waveguides; low-loss germanosilicate layers; propagation loss;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
