Title :
Arbitrary wave profile generation of a laser using a digital micromirror device
Author :
Park, Jung-Rae ; Donaldson, W.R. ; Sobolewski, Roman ; Kearney, K.
Author_Institution :
Lab. for Laser Energetics, Rochester Univ., NY, USA
Abstract :
A digital micromirror device (DMD) is a microelectromechanical structure (MEMS) device with many micromirrors on the top surface; it is used as a spatial light modulator for many applications, including lithography, projection, telecommunications, and lasers. We determined the limiting resolution of a DMD by measuring the modulation transfer function (MTF) of a DMD and intersecting with the aerial image modulation (AIM) at 351 -nm wavelength. The limiting resolution was 14.61 cycles/mm. We generated the laser-beam profile by changing the pattern of micromirrors in the DMD. The input beam from center peaked profile transformed into a flattop super-Gaussian profile with order 6.
Keywords :
image resolution; laser beams; micromechanical devices; micromirrors; optical transfer function; spatial light modulators; 351 nm; MEMS device; aerial image modulation; arbitrary wave profile generation; center peaked profile; digital micromirror device; flattop super-Gaussian profile; laser; laser-beam profile; limiting resolution; lithography; microelectromechanical structure; modulation transfer function; projection; spatial light modulator; telecommunications;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
