Title :
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Author :
Moktadir, Z. ; Prakash, G.V. ; Koukharenko, E. ; Gollasch, C. ; Bagnall, D.M. ; Kraft, M. ; Hinds, E. ; Baumberg, J.J.
Author_Institution :
Sch. of Electron. & Comput. Sci., Southampton Univ., UK
Abstract :
We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
Keywords :
antireflection coatings; etching; gold; micromirrors; optical fabrication; silicon; KOH; Si; anisotropic etching; gold coating; micromirrors; silicon;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
