DocumentCode
421679
Title
Optical instrumentation for elastic light scattering monitoring of surface and bulk properties
Author
Sterligov, V.A. ; Cheyssac, P. ; Bossis, G. ; Metayer, C.
Author_Institution
Laboratoire de Physique de la Matiere Condensee, Nice Univ., France
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
A new and powerful method for characterization and monitoring of surface and bulk properties has been developed. This method is based on fast, sensitive and accurate measurements of the half-sphere´s angular distribution of scattered light.
Keywords
light scattering; monitoring; rough surfaces; surface topography measurement; angular distribution; elastic light scattering monitoring;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360888
Link To Document