DocumentCode
421753
Title
Nano-patterning of PMMA using a /spl lambda/ = 46.9 nm table-top laser
Author
Capeluto, M.G. ; Marconi, M.C. ; Ludena, S. ; Pietrasanta, C. ; Grisham, M. ; Reagan, B. ; Menoni, C.S. ; Rocca, J.J.
Author_Institution
Departamento de Fisica, Buenos Aires Univ., Argentina
Volume
2
fYear
2004
fDate
16-21 May 2004
Abstract
The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.
Keywords
Fresnel diffraction; gas lasers; laser materials processing; laser transitions; nanopatterning; polymers; ultraviolet sources; 46.9 nm; Fresnel diffraction pattern; PMMA; capillary discharge laser; nanopatterning; table-top laser;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1360993
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