DocumentCode
422072
Title
Measurement of angular deviation in ultra-linear mirror actuators for scanning high finesse resonators
Author
Fidric, Bernard ; Kachanov, Alexander ; Tan, Sze ; Crosson, Eric ; Paldus, Barbara
Author_Institution
Picarro Inc., Sunnyvale, CA, USA
Volume
1
fYear
2004
fDate
16-21 May 2004
Abstract
We describe a new method for measuring angular deviations of linear actuators as small as 0.1 /spl mu/rad//spl mu/m. Two designs of ultra-linear actuators for cavity ring-down spectroscopy are characterized and compared by achievable sensitivity.
Keywords
Fabry-Perot resonators; attitude measurement; electric actuators; mirrors; optical design techniques; cavity ring-down spectroscopy; scanning high finesse resonators; ultralinear mirror actuators;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location
San Francisco, CA
Print_ISBN
1-55752-777-6
Type
conf
Filename
1361538
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