Title :
Nanomotion measurement by phase conjugate interferometry
Author :
Kurtz, RM ; Pradhan, R.D. ; Aye, T.M. ; Savant, G.D. ; Klein, M.V.
Author_Institution :
Electro-Optics & Holography Div., Phys. Opt. Corp., Torrance, CA, USA
Abstract :
A new interferometer design for measuring nanometer-level motion is presented. Experiments show that this new design enables motion measurement at much longer distances than the current state of the art with no loss in accuracy.
Keywords :
light interferometry; motion measurement; optical design techniques; optical phase conjugation; nanomotion measurement; phase conjugate interferometry;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
