Title :
Interferometric displacement measurement by use of time-shared two-wavelength laser diode
Author :
Suzuki, T. ; Mitomi, M. ; Sasaki, O.
Author_Institution :
Fac. of Eng., Niigata Univ., Japan
Abstract :
A displacement sensor that uses both two-wavelength interferometry and a novel two-wavelength laser source is proposed. This system accurately measures displacement to within range of several hundred /spl mu/m and resolution to within /spl sim/3 /spl mu/m, respectively.
Keywords :
displacement measurement; light interferometry; measurement by laser beam; optical sensors; semiconductor lasers; displacement sensor; interferometric displacement measurement; time-shared two-wavelength laser diode; two-wavelength interferometry;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
