Title :
Interferometric characterization of transmission diffraction gratings with non-flat substrate surfaces
Author :
Sumetsky, M. ; White, T. ; Dyson, I.M. ; Westbrook, P.S. ; Eggleton, B.J.
Author_Institution :
OFD Lab., Murray Hill, NJ, USA
Abstract :
We demonstrate a side-diffraction interferometric method for characterization of transmission diffraction gratings enabling simultaneous measurement of the local chirp and substrate thickness variation.
Keywords :
diffraction gratings; light interferometry; surface topography measurement; nonflat substrate surfaces; side-diffraction interferometric method; transmission diffraction gratings;
Conference_Titel :
Lasers and Electro-Optics, 2004. (CLEO). Conference on
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-777-6
